The plastic and creep characteristics of silicon microstructure at elevated temperature
Yao, Shaokang, Xu, Dehui, Xiong, Bin, Wang, YuelinVolume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2184-x
Date:
May, 2015
File:
PDF, 1.07 MB
english, 2015