Novel piezoelectric actuator control slider using...

Microsystem Technologies 2014 / 12 Vol. 20; Iss. 12

Novel piezoelectric actuator control slider using transverse-mode deformation

Shen, Shengnan, Li, Hui, Du, Hejun, Liu, Bo
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Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2217-5
Date:
December, 2014
File:
PDF, 1.11 MB
english, 2014
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