Performance improvement of RF-MEMS capacitive switch via...

Microsystem Technologies 2015 / 7 Vol. 21; Iss. 7

Performance improvement of RF-MEMS capacitive switch via asymmetric structure design

Angira, Mahesh, Rangra, Kamaljit
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Volume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2222-8
Date:
July, 2015
File:
PDF, 1.33 MB
english, 2015
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