AlN epilayers and nanostructures growth in a homebuilt...

Journal of Materials Science: Materials in Electronics 2014 / 05 Vol. 25; Iss. 5

AlN epilayers and nanostructures growth in a homebuilt alumina hot-wall high temperature chemical vapor deposition system

Zhang, Dian, Liu, Fa-Min, Yao, Yuan, Yang, Xin-An
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Volume:
25
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-014-1861-y
Date:
May, 2014
File:
PDF, 3.83 MB
english, 2014
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