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Diffusion induced residual stress in comb-type microaccelerometer structure
Dutta, Shankar, Shaveta,, Imran, Md., Pal, Ramjay, Bhan, R. K.Volume:
25
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-014-2095-8
Date:
September, 2014
File:
PDF, 2.40 MB
english, 2014