A System for the Spectral Monitoring of the Deposition of...

Measurement Techniques 2014 / 03 Vol. 56; Iss. 12

A System for the Spectral Monitoring of the Deposition of Multilayer Dielectric Coatings

Labusov, V. A., Semenov, Z. V., Zarubin, I. A., Saushkin, M. S., Erg, G. V., Kovalev, S. I.
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Volume:
56
Language:
english
Journal:
Measurement Techniques
DOI:
10.1007/s11018-014-0376-5
Date:
March, 2014
File:
PDF, 166 KB
english, 2014
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