Numerical Modeling of an RF Argon–Silane Plasma with Dust...

Plasma Chemistry and Plasma Processing 2014 / 05 Vol. 34; Iss. 3

Numerical Modeling of an RF Argon–Silane Plasma with Dust Particle Nucleation and Growth

Agarwal, Pulkit, Girshick, Steven L.
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Volume:
34
Language:
english
Journal:
Plasma Chemistry and Plasma Processing
DOI:
10.1007/s11090-013-9511-3
Date:
May, 2014
File:
PDF, 1.37 MB
english, 2014
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