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The effect of working gas pressure and deposition power on the properties of molybdenum films deposited by DC magnetron sputtering
Cao, Hong, Zhang, ChuanJun, Chu, JunHaoVolume:
57
Language:
english
Journal:
Science China Technological Sciences
DOI:
10.1007/s11431-014-5537-x
Date:
May, 2014
File:
PDF, 2.12 MB
english, 2014