A trilayer process for the fabrication of Al phase qubits

SCIENCE CHINA Physics, Mechanics & Astronomy 2013 / 12 Vol. 56; Iss. 12

A trilayer process for the fabrication of Al phase qubits

Xue, GuangMing, Yu, HaiFeng, Tian, Ye, Deng, Hui, Liu, WeiYang, Ren, YuFeng, Yu, HongWei, Zheng, DongNing, Zhao, ShiPing
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Volume:
56
Language:
english
Journal:
Science China Physics, Mechanics and Astronomy
DOI:
10.1007/s11433-013-5351-7
Date:
December, 2013
File:
PDF, 427 KB
english, 2013
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