Effect of Alcohol-Assisted Annealing on the Quality of...

Journal of Electronic Materials 2014 / 07 Vol. 43; Iss. 7

Effect of Alcohol-Assisted Annealing on the Quality of Silicon Oxide Thin Film

Ito, Takuya, Ota, Yasuyuki, Shiomori, Koichiro, Nishioka, Kensuke
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Volume:
43
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-014-3133-2
Date:
July, 2014
File:
PDF, 599 KB
english, 2014
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