Observation of TaBxOyAlong the Ta Diffusion Path Through a...

Journal of Materials Engineering and Performance 2014 / 08 Vol. 23; Iss. 8

Observation of TaBxOyAlong the Ta Diffusion Path Through a Boron and Oxygen Containing Tri-layer Structure

Ying, Ji-Feng, Ji, Rong, Wang, Chen Chen, Ter Lim, Sze, Xie, Huiqing, Gerard, Ernult F.
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Volume:
23
Language:
english
Journal:
Journal of Materials Engineering and Performance
DOI:
10.1007/s11665-014-1034-4
Date:
August, 2014
File:
PDF, 584 KB
english, 2014
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