Modeling, identification and compensation for geometric...

Journal of Central South University 2014 / 03 Vol. 21; Iss. 3

Modeling, identification and compensation for geometric errors of laser annealing table

Li, Dian-xin, Zhang, Jian-fu, Zhang, Yun-liang, Feng, Ping-fa
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Volume:
21
Language:
english
Journal:
Journal of Central South University
DOI:
10.1007/s11771-014-2017-1
Date:
March, 2014
File:
PDF, 746 KB
english, 2014
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