Modification of optical and mechanical surface properties...

International Journal of Precision Engineering and Manufacturing 2014 / 05 Vol. 15; Iss. 5

Modification of optical and mechanical surface properties of sputter-deposited aluminum thin films through ion implantation

Kang, Tae June, Kim, Jeong-Gil, Lee, Ho-Young, Lee, Jae-Sang, Lee, Jae-Hyung, Hahn, Jun-Hee, Kim, Yong Hyup
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Volume:
15
Language:
english
Journal:
International Journal of Precision Engineering and Manufacturing
DOI:
10.1007/s12541-014-0413-y
Date:
May, 2014
File:
PDF, 1.14 MB
english, 2014
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