Preliminary study on the effect of spray slurry nozzle in...

Preliminary study on the effect of spray slurry nozzle in CMP for environmental sustainability

Lee, Hyunseop, Park, Yeongbong, Lee, Sangjik, Jeong, Haedo
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Volume:
15
Language:
english
Journal:
International Journal of Precision Engineering and Manufacturing
DOI:
10.1007/s12541-014-0427-5
Date:
June, 2014
File:
PDF, 813 KB
english, 2014
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