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Preliminary study on the effect of spray slurry nozzle in CMP for environmental sustainability
Lee, Hyunseop, Park, Yeongbong, Lee, Sangjik, Jeong, HaedoVolume:
15
Language:
english
Journal:
International Journal of Precision Engineering and Manufacturing
DOI:
10.1007/s12541-014-0427-5
Date:
June, 2014
File:
PDF, 813 KB
english, 2014