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Fabrication of nano-structures on glass substrate by modified nano-imprint patterning with a plasma-induced surface-oxidized Cr mask
Lee, So Hee, Lee, Su Yeon, Lee, Seong Eui, Lee, Heon, Lee, Hee ChulVolume:
10
Language:
english
Journal:
Electronic Materials Letters
DOI:
10.1007/s13391-013-3230-z
Date:
March, 2014
File:
PDF, 766 KB
english, 2014