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Equipment for deposition of thin metallic films bombarded by fast argon atoms
Metel, A., Bolbukov, V., Volosova, M., Grigoriev, S., Melnik, Yu.Volume:
57
Language:
english
Journal:
Instruments and Experimental Techniques
DOI:
10.1134/S0020441214020110
Date:
May, 2014
File:
PDF, 261 KB
english, 2014