Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2014 / 05 Vol. 8; Iss. 3
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Different coloration of the nanostructured silicon surface upon plasma-assisted etching
Zalutskaya, A. A., Prokaznikov, A. V.Volume:
8
Language:
english
Journal:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451014030367
Date:
May, 2014
File:
PDF, 465 KB
english, 2014