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Ion implantation of positive photoresists
Brinkevich, D. I., Brinkevich, S. D., Vabishchevich, N. V., Odzhaev, V. B., Prosolovich, V. S.Volume:
43
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/S106373971401003X
Date:
May, 2014
File:
PDF, 688 KB
english, 2014