Study of the structural quality of heteroepitaxial...

Crystallography Reports 2014 / 05 Vol. 59; Iss. 3

Study of the structural quality of heteroepitaxial silicon-on-sapphire structures by high-resolution X-ray diffraction, X-ray reflectivity, and electron microscopy

Blagov, A. E., Vasiliev, A. L., Golubeva, A. S., Ivanov, I. A., Kondratev, O. A., Pisarevsky, Yu. V., Presnyakov, M. Yu., Prosekov, P. A., Seregin, A. Yu.
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Volume:
59
Language:
english
Journal:
Crystallography Reports
DOI:
10.1134/S1063774514030043
Date:
May, 2014
File:
PDF, 1.39 MB
english, 2014
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