Doping of silicon with selenium by diffusion from the gas phase
Astrov, Yu. A., Shuman, V. B., Portsel, L. M., Lodygin, A. N.Volume:
48
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782614030038
Date:
March, 2014
File:
PDF, 156 KB
english, 2014