On the self-structuring of single-crystal silicon wafers under inductive heating in vacuum
Mynbaeva, M. G., Lebedev, S. P., Lavrent’ev, A. A., Mynbaev, K. D., Golovatenko, A. A., Lebedev, A. A., Nikolaev, V. I.Volume:
48
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S106378261403018X
Date:
March, 2014
File:
PDF, 2.37 MB
english, 2014