Anomalous distribution of germanium implanted into a SOI...

Anomalous distribution of germanium implanted into a SOI dielectric layer after the annealing of radiation defects

Pankratov, E. L., Gus’kova, O. P., Drozdov, M. N., Abrosimova, N. D., Vorotyntsev, V. M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
48
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782614050170
Date:
May, 2014
File:
PDF, 206 KB
english, 2014
Conversion to is in progress
Conversion to is failed