On the features of hydrogen detection by a semiconductor...

Semiconductors 2014 / 05 Vol. 48; Iss. 5

On the features of hydrogen detection by a semiconductor structure grown on a 6H-SiC substrate by the combined method of platinum ion implantation and deposition

Zuev, V. V., Grigoriev, S. N., Romanov, R. I., Fominski, V. Yu., Grigoriev, V. V.
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Volume:
48
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S106378261405025X
Date:
May, 2014
File:
PDF, 1.05 MB
english, 2014
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