Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions
Ivina, N. L., Orlov, L. K.Volume:
48
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S106378261406013X
Date:
June, 2014
File:
PDF, 345 KB
english, 2014