Properties of TiO2films on silicon substrate
Kalygina, V. M., Novikov, V. A., Petrova, Yu. S., Tolbanov, O. P., Chernikov, E. V., Tcupiy, S. Yu., Yaskevich, T. M.Volume:
48
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782614060141
Date:
June, 2014
File:
PDF, 1.21 MB
english, 2014