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Modification of the structure and hydrogen content of amorphous hydrogenated silicon films under conditions of femtosecond laser-induced crystallization
Emelyanov, A. V., Kazanskii, A. G., Kashkarov, P. K., Konkov, O. I., Kutuzov, N. P., Lyaskovskii, V. L., Forsh, P. A., Khenkin, M. V.Volume:
40
Language:
english
Journal:
Technical Physics Letters
DOI:
10.1134/S1063785014020217
Date:
February, 2014
File:
PDF, 810 KB
english, 2014