SVM based layout retargeting for fast and regularized inverse lithography
Luo, Kai-sheng, Shi, Zheng, Yan, Xiao-lang, Geng, ZhenVolume:
15
Language:
english
Journal:
Journal of Zhejiang University SCIENCE C
DOI:
10.1631/jzus.C1300357
Date:
May, 2014
File:
PDF, 587 KB
english, 2014