Ultrafast crystallization of amorphous silicon thin films by using an electron beam annealing method
Kim, Changheon, Lim, Sangwoo, Jeong, ChaehwanVolume:
64
Language:
english
Journal:
Journal of the Korean Physical Society
DOI:
10.3938/jkps.64.1091
Date:
April, 2014
File:
PDF, 1.05 MB
english, 2014