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[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - Test and evaluation of a silicon resonant accelerometer implemented in SOI technology
Guo-ming, Xia, An-ping, Qiu, Qin, Shi, Yan, SuYear:
2013
Language:
english
DOI:
10.1109/ICSENS.2013.6688238
File:
PDF, 523 KB
english, 2013