[IEEE 2013 IEEE Sensors - Baltimore, MD, USA...

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[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - Nano-precision force and displacement measurements using MEMS resonant structures

Mehdizadeh, Emad, Guo, Xiaobo, Pourkamali, Siavash, Hajjam, Arash, Rahafrooz, Amir
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Year:
2013
Language:
english
DOI:
10.1109/ICSENS.2013.6688240
File:
PDF, 1.19 MB
english, 2013
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