[IEEE 2013 IEEE Sensors - Baltimore, MD, USA...

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[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - Shaped combs and parametric amplification in inertial MEMS sensors

Sharma, Mrigank, Sarraf, Elie H, Cretu, Edmond
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Year:
2013
Language:
english
DOI:
10.1109/ICSENS.2013.6688242
File:
PDF, 3.19 MB
english, 2013
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