Two-Dimensional Transport of Submicron Particles in...

Japanese Journal of Applied Physics 1997 / 6 Vol. 36; Iss. Part 1, No

Two-Dimensional Transport of Submicron Particles in Capacitively Coupled Plasma Reactor

Hashido, Ryu-ichi, Hasebe, Masao, Hosokawa, Yoshiyuki, Nakano, Nobuhiko, Yamaguchi, Yukio, Makabe, Toshiaki
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.36.3707
Date:
June, 1997
File:
PDF, 1.15 MB
1997
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