Argon–oxygen dc magnetron discharge plasma probed with ion acoustic waves
Saikia, Partha, Saikia, Bipul Kumar, Goswami, Kalyan Sindhu, Phukan, ArindamVolume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4871081
Date:
May, 2014
File:
PDF, 955 KB
english, 2014