Characterization and simulation analysis of laser-induced...

Materials Science in Semiconductor Processing 2013 / 12 Vol. 16; Iss. 6

Characterization and simulation analysis of laser-induced crystallization of amorphous silicon thin films

Huang, Lu, Jin, Jing, Shi, Weimin, Yuan, Zhijun, Yang, Weiguang, Cao, Zechun, Wang, Linjun, Zhou, Jun, Lou, Qihong
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Volume:
16
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2013.07.005
Date:
December, 2013
File:
PDF, 1.98 MB
english, 2013
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