Study on Indium Tin Oxide Films Deposited Using Different...

Materials Science Forum 2007 Vol. 544-545

Study on Indium Tin Oxide Films Deposited Using Different Conductive ITO Targets by DC Magnetron Sputtering

Park, Joon Hong, Lee, Sang Chul, Lee, Gun Hwan, Song, Pung Keun
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Volume:
544-545
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.544-545.833
File:
PDF, 561 KB
english, 2007
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