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High-precision phase-shifting interferometry with spherical wavefront reference
Xu, Xianfeng, Lu, Guangcan, Tian, Yanjie, Han, Guoxia, Yuan, Hongguang, Gao, Fei, Miao, Xingxu, Jiao, ZhiyongVolume:
52
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.52.00a188
Date:
January, 2013
File:
PDF, 744 KB
english, 2013