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[IEEE 2009 10th International Conferene on Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Delft, The Netherlands (2009.04.26-2009.04.29)] EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - A conformal mapping based approach for fast two-dimensional FEM electrostatic analysis of MEMS devices without re-meshing
Sumant, Prasad S., Cangellaris, Andreas C., Aluru, Narayana R.Year:
2009
Language:
english
DOI:
10.1109/esime.2009.4938407
File:
PDF, 542 KB
english, 2009