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Spatial Distribution and Surface Loss of CF 3 and CF 2 Radicals in a CF 4 Etching Plasma
Hikosaka, Yukinobu, Toyoda, Hirotaka, Sugai, HideoVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.32.l353
Date:
March, 1993
File:
PDF, 739 KB
1993