Comparison of low- and room-temperature damage formation in...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2013 / 7 Vol. 307

Comparison of low- and room-temperature damage formation in Ar ion implanted GaN and ZnO

Wendler, E., Wesch, W., Azarov, A.Yu., Catarino, N., Redondo-Cubero, A., Alves, E., Lorenz, K.
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Volume:
307
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2013.01.020
Date:
July, 2013
File:
PDF, 555 KB
english, 2013
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