High temperature characterization of PZT(0.52/0.48)...

Journal of Micromechanics and Microengineering 2014 / 01 Vol. 24; Iss. 1

High temperature characterization of PZT(0.52/0.48) thin-film pressure sensors

Asadnia, M, Kottapalli, A G P, Miao, J M, Randles, A B, Sabbagh, A, Kropelnicki, P, Tsai, J M
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Volume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/1/015017
Date:
January, 2014
File:
PDF, 2.34 MB
english, 2014
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