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A planar-type surface-wave plasma source with a subwavelength diffraction grating inclusion for large-area plasma applications
Chen, Zhaoquan, Liu, Minghai, Tang, Liang, Hu, Peng, Hu, XiweiVolume:
106
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3168493
File:
PDF, 752 KB
english, 2009