Contact block reduction method and its application to a 10 nm MOSFET device
Mamaluy, Denis, Mannargudi, Anand, Vasileska, Dragica, Sabathil, Matthias, Vogl, PeterVolume:
19
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/19/4/042
Date:
April, 2004
File:
PDF, 253 KB
english, 2004