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Selective growth of carbon nanotube for via interconnects by oxidation and selective reduction of catalyst
Lee, Sunwoo, Moon, Seongho, Yoon, Hong Sik, Wang, Xiaofeng, Kim, Dong Woo, Yeo, In-Seok, Chung, U-In, Moon, Joo-Tae, Chung, JaegwanVolume:
93
Year:
2008
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3021363
File:
PDF, 523 KB
english, 2008