Impact of Geometry on Thermoelastic Dissipation in...

Journal of Microelectromechanical Systems 2006 / 08 Vol. 15; Iss. 4

Impact of Geometry on Thermoelastic Dissipation in Micromechanical Resonant Beams

Candler, R.N., Duwel, A., Varghese, M., Chandorkar, S.A., Hopcroft, M.A., Park, W.-T., Kim, B., Yama, G., Partridge, A., Lutz, M., Kenny, T.W.
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Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.879374
Date:
August, 2006
File:
PDF, 1.73 MB
english, 2006
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