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Spectroscopic studies on nanocrystalline silicon thin films prepared from H2-diluted SiH4-plasma in inductively coupled low pressure RF PECVD
Chakraborty, Mahua, Banerjee, Amit, Das, DebajyotiVolume:
61
Language:
english
Journal:
Physica E: Low-dimensional Systems and Nanostructures
DOI:
10.1016/j.physe.2014.03.016
Date:
July, 2014
File:
PDF, 1.71 MB
english, 2014