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Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating
Laboriante, Ian, Suwandi, Anton, Carraro, Carlo, Maboudian, RoyaVolume:
193
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.01.036
Date:
April, 2013
File:
PDF, 2.21 MB
english, 2013