Lubrication of polycrystalline silicon MEMS via a thin...

Sensors and Actuators A: Physical 2013 / 4 Vol. 193

Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating

Laboriante, Ian, Suwandi, Anton, Carraro, Carlo, Maboudian, Roya
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Volume:
193
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.01.036
Date:
April, 2013
File:
PDF, 2.21 MB
english, 2013
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