Study of Magnetic Fields of Magnetron Sputtering Affecting CrN Films
Jean, Ming Der, Sheen, Maw Tyan, Wu, Ching Fu, Chen, Feng Ming, Lee, San JenVolume:
401-403
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/amm.401-403.822
Date:
September, 2013
File:
PDF, 3.56 MB
english, 2013