Study of Magnetic Fields of Magnetron Sputtering Affecting...

Study of Magnetic Fields of Magnetron Sputtering Affecting CrN Films

Jean, Ming Der, Sheen, Maw Tyan, Wu, Ching Fu, Chen, Feng Ming, Lee, San Jen
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Volume:
401-403
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/amm.401-403.822
Date:
September, 2013
File:
PDF, 3.56 MB
english, 2013
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