Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches
Lee, Hee-Chul, Park, Jae-Hyoung, Park, Jae-Yeong, Nam, Hyo-Jin, Bu, Jong-UkVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/11/015
Date:
November, 2005
File:
PDF, 1.07 MB
english, 2005