Highly uniform growth of 2-inch GaN wafers with a...

Journal of Crystal Growth 2014 / 02 Vol. 388

Highly uniform growth of 2-inch GaN wafers with a multi-wafer HVPE system

Liu, Nanliu, Wu, Jiejun, Li, Wenhui, Luo, Ruihong, Tong, Yuzhen, Zhang, Guoyi
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Volume:
388
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2013.11.023
Date:
February, 2014
File:
PDF, 3.55 MB
english, 2014
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