High performance PZT thick films based on bonding technique...

High performance PZT thick films based on bonding technique for d31 mode harvester with integrated proof mass

Yang, Bin, Zhu, Yanbo, Wang, Xingzhao, Liu, Jing-quan, Chen, Xiang, Yang, Chunsheng
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Volume:
214
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.04.031
Date:
August, 2014
File:
PDF, 4.11 MB
english, 2014
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